Professor Michael Yu WANG
prof.wang

ASME Fellow, HKIE Fellow, IEEE Fellow


The Chinese University of Hong Kong


Website: http://www.mae.cuhk.edu.hk/~yuwang


Email:

Biography

Michael Yu Wang is a Professor at the Chinese University of Hong Kong, after ten years with the Department of Mechanical Engineering, University of Maryland. He has numerous professional honors–National Science Foundation Research Initiation Award, 1993; Ralph R. Teetor Educational Award from Society of Automotive Engineers, 1994; LaRoux K. Gillespie Outstanding Young Manufacturing Engineer Award from Society of Manufacturing Engineers, 1995; Boeing–A.D. Welliver Faculty Summer Fellow, Boeing, 1998; Distinguished Investigator Award of NSFC; Chang Jiang (Cheung Kong) Scholars Award from the Ministry of Education of China and Li Ka Shing Foundation (Hong Kong). He received the Kayamori Best Paper Award of 2001 IEEE International Conference on Robotics and Automation (with D. Pelinescu), the Compliant Mechanisms Award-Theory of ASME 31st Mechanisms and Robotics Conference in 2007, and Research Excellence Award (07-08) of CUHK. He is a Senior Editor of IEEE Trans. on Automation Science and Engineering, and served as an Associate Editor of IEEE Trans. on Robotics and Automation and ASME Journal of Manufacturing Science and Engineering. He is a Distinguished Lecturer of IEEE Robotics and Automation Society (2006-2009). His research interests include computational design and optimization of solids, precision engineering, and electronic and photonic manufacturing, with over 200 technical publications in these areas. He received his Ph.D degree from Carnegie Mellon University (1989). He is a Fellow of ASME, HKIE, and IEEE.

Title

Compliant Mechanisms for MEMS and Flexonics

Abstract

A continuum compliant mechanism transmits applied forces from specified input ports to output ports by elastic deformation of its comprising materials, fulfilling required functions analogous to a rigid-body mechanism. It has a large range of applications in both micro and macro domains. This presentation describes a level-set method for designing monolithic mechanisms with distributed compliance and/or made of multiple materials. Central to the method is a level-set model that precisely specifies the distinct material regions and their sharp interfaces as well as the geometric boundary of the structure, capable of performing topological changes and capturing geometric evolutions at the interface and the boundary.

Techniques for eliminating de facto hinges and for geometric control in the design are discussed, aiming at producing more reliable compliant mechanism designs for MEMS devices. We further discuss the intrinsic deficiencies in the widely used “spring model” and propose a new formulation considering the “characteristic stiffness” of the mechanism. The result is a design with highly even-distributed compliance and a more desirable characteristic, which uniquely distinguishes our method. These methods are demonstrated with benchmark examples of both structure optimization and compliant mechanism optimization. The compliant mechanisms are intended for the use in automated assembly of hybrid MEMS with self-alignment techniques to eliminate tight positioning requirements.